Product Summary
This is a hydrostatic gas bearing that uses a porous carbon material.
It supports the load with gas film force and operates without contact, enabling high-speed and precise guiding. It is extremely clean, with no friction or wear and almost no dust generation.
It supports the load with gas film force and operates without contact, enabling high-speed and precise guiding. It is extremely clean, with no friction or wear and almost no dust generation.
Product features
- Operates without contact using porous carbon material
- Highly clean due to almost no friction, wear or dust generation
- High rigidity due to porous material drawing
Introduction example
Our products are used in a wide variety of equipment.
- Semiconductor Wafer Manufacturing Equipment
- Semiconductor Wafer Inspection Equipment
- FPD manufacturing equipment
- FPD Inspection Equipment
Product specifications and performance
Size
Round: φ40mm to φ250mm
Square: □40mm×□40mm~□300mm×□250mm
Square: □40mm×□40mm~□300mm×□250mm
Performance Graph
Bearing diameter φ80mm
Support
We provide full support right up to product implementation.
Flow until delivery
