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Hydrostatic Gas Bearing
"Air bearing"
Non-contact, high-speed and precise guidance
Product Summary
This is a hydrostatic gas bearing that uses a porous carbon material.
It supports the load with gas film force and operates without contact, enabling high-speed and precise guiding. It is extremely clean, with no friction or wear and almost no dust generation.
Product features
  • Operates without contact using porous carbon material
  • Highly clean due to almost no friction, wear or dust generation
  • High rigidity due to porous material drawing
Introduction example
Our products are used in a wide variety of equipment.
  • Semiconductor Wafer Manufacturing Equipment
  • Semiconductor Wafer Inspection Equipment
  • FPD manufacturing equipment
  • FPD Inspection Equipment
Product specifications and performance
Size
Round: φ40mm to φ250mm
Square: □40mm×□40mm~□300mm×□250mm
Performance Graph
Bearing diameter φ80mm
Load Capacity
rigidity
flow
Support
We provide full support right up to product implementation.
Flow until delivery

TANKEN SEAL SEIKO CO., LTD.

146-0093 Tokyo, Ohta City, Yaguchi 3-14-15 TEL:03-3750-2151 FAX:03-3750-5171

Copyright©TANKEN SEAL SEIKO CO., LTD. All Rights Reserved.

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