Product Summary
This vacuum suction cup is made entirely of carbon material, combining a porous carbon adsorbent with a high-strength carbon structure.
The average pore size is extremely small at 5μm, so there is no transfer of suction marks. It is lightweight, does not deform or break even in harsh temperature environments, and has excellent electrical properties. It is a porous suction pad that makes the most of the characteristics of carbon.
The average pore size is extremely small at 5μm, so there is no transfer of suction marks. It is lightweight, does not deform or break even in harsh temperature environments, and has excellent electrical properties. It is a porous suction pad that makes the most of the characteristics of carbon.
Product features
Wafer static electricity prevention
Material | Porous Carbon | alumina | aluminum |
Electrical resistance value (μΩ・m) | 100 | > 1X1012 | 2.6X10-2 |
Suitable for high temperature environments
Lighter weight reduces strain on equipment
Φ450mm all-carbon suction cup
Weight 2100g
Weight 2100g
Introduction example
An increasing number of companies are considering introducing it in the following processes.
1. Semiconductor manufacturing (post-processing) by equipment
- Adsorption table for attaching protective tape to wafer surface
- Adsorption table for removing protective tape from wafer surface
- Vacuum table for wafer inspection equipment
- UV irradiation device suction table
- Vacuum chucking for material handling in wafer mounter equipment
- Spinner head for wafer cleaning equipment
etc.
②Semiconductor manufacturing (post-processing) by process
- TSV process
- Dicing Process
- Back grinding process
Product Specifications
Porous Carbon x High-strength carbon | Porous Carbon x Other materials | |
working pressure | -0.1MPa to 0.1MPa | -0.1MPa to 0.1MPa |
Operating temperature | ～250℃ | 23℃±2℃ |
Available dimensions (adsorption surface) | ～φ450mm ～□350mm | ～φ450mm ～□350mm |
Available dimensions (thickness) | From 12mm | From 15mm (For metal materials) |
Flatness | 10μm～ | 5μm～ |
Support
We provide full support right up to product implementation.
Flow until delivery
Creating a design sheet
When contacting us, please have the following items ready to assist us in providing you with a smooth response:
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(122KB) |
Video link (All-carbon suction cup)
Weight measurement (0:27)
Partial adsorption (0:40)
